CMOS技术中的集成化学微传感系统

Preface

1 Introduction

2 Fundamentals of Chemical Sensing

3 Microtechnology for Chemical Sensors

3.1 Microtechnology Substrate Materials

3.2 Fundamental Semiconductor Processing Steps

3.2.1 Deposition

3.2.2 Patterning

3.2.3 Etching

3.2.4 Doping.

3.3 CMOS Technology

3.4 Microfabrication for Chemical Sensors

3.4.1 Micromachining for Chemical Microsensors

3.4.2 Wafer Bonding

3.4.3 Sensitive-Layer Deposition

4 Microfabricated Chemical Sensors

4.1 Chemomechanical Sensors

4.1.1 Rayleigh SAW Devices

4.1.2 Flexural-Plate-Wave or Lamb-Wave Devices

4.1.3 Resonating Cantilevers

4.2 Thermal Sensors

4.2.1 Catalytic Thermal Sensors （Pellistors）

4.2.2 Thermoelectric or Seebeck-Effect Sensors

4.3 Optical Sensors

4.3.1 Integrated Optics

4.3.2 Microspectrometers

4.3.2.1 Fabry-Perot-Type Structures

4.3.2.2 Grating-Type Structures

4.3.3 Bioluminescent Bioreporter Integrated Circuits （BBIC）

4.3.4 Surface Plasmon Resonance （SPR） Devices

4.4 Electrochemical Sensors

4.4.1 Voltammetric Sensors

4.4.2 Potentiometric Sensors

5 CMOS Platform Technology for Chemical Sensors

5.1 CMOS Capacitive Microsystems

5.1.1 CMOS Capacitive Transducer

5.1.2 On-Chip Circuitry of the Capacitive Microsystem

5.1.3 Capacitive Gas Sensing

5.2 CMOS Calorimetric Device

5.2.1 CMOS Calorimetric Transducer

5.2.2 Calorimeter Circuitry

5.2.3 Calorimetric Gas Sensing

5.3 CMOS Integrated Resonant Cantilever

5.3.1 Resonant Cantilever Transducers

5.3.2 Microcantilever Circuitry

5.3.3 Microcantilevers as Chemical Sensors

5.3.4 Comparison of Cantilevers to Other Mass-Sensitive Devices

5.4 CMOS Microhotplate System Development

5.4.1 CMOS Microhotplates

5.4.2 Hotplate-Based CMOS Monolithic Microsystems

5.5 CMOS Chemical Multisensor Systems

5.5.1 CMOS Multiparameter Biochemical Microsystem

5.5.2 CMOS Gas-Phase Multisensor System

5.6 CMOS Chemical Microsensor and System Packaging

5.6.1 Simple Epoxy-Based Package

5.6.2 Chip-on-Board Package

5.6.3 Flip-Chip Package ，

6 Outlook and Future Developments

References

Abbreviations

Index

《CMOS技术中的集成化学微传感系统》涵盖了CMOS化学微传感系统的各个领域，详细论述了化学微传感器在CMOS中的集成技术。在做了简要介绍之后，阐述了所有必备的基础知识，介绍了各种化学敏感方法，并介绍了CMOS技术及其在微、传感器中的应用，最后对未来的发展作出了展望。
《CMOS技术中的集成化学微传感系统》内容丰富，涵盖了大量的基础知识及CMOS技术中化学微传感器的相关重要信息，适合希望从事此领域工作的学生、工程技术人员、科学家阅读，对于熟悉本领域的专家也很有参考价值。